FEATURES
APPLICATIONS
Li-Ion Battery |
Chalcopyrite XRF |
Multilayer Ceramic Capacitor |
Carbon-fiber Reinforced Polymer |
Resolution Test |
SPECIFICATIONS
GENERAL | |
Minimum voxel size (for 1.5 mm object diameter) | 40 nm |
Spatial Resolution (on a JIMA) |
300 nm
|
Detector 1 | 7 Mp flatpanel (FP), 14-bit |
Detector 2 | 27Mp true 16-bit back-illuminated sCMOS |
Energy filter changer |
Automatic, 7 positions
|
Integrated anti-vibration | Granite platform on pneumatic leveling feet |
Positioning accuracy during scanning: rotation runout | < 50 nm |
X-RAY SOURCE | |
Type
|
Open (pumped) source with tungsten on diamond target |
Smallest spotsize | 250-300 nm |
Energy/Power Range | 20-160 kV, 16W |
Vacuum | Fully integrated into the system |
XRF Module | 2 x 50 kV, 50 W each |
X-RAY CAMERA | |
Detector 1 | 7MP 14-bit Flatpanel |
Detector 2 | 27Mp True 16-bit, back-illuminated sCMOS |
Radiation protection | Both with radiation hardened fiber-optics |
XRF Module | Photon-counting 4 Mp detector, 300 eV energy resolution |