FEATURES
APPLICATIONS
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| Li-Ion Battery |
Chalcopyrite XRF |
Multilayer Ceramic Capacitor |
Carbon-fiber Reinforced Polymer |
Resolution Test |
SPECIFICATIONS
| GENERAL | |
| Minimum voxel size (for 1.5 mm object diameter) | 40 nm |
| Spatial Resolution (on a JIMA) |
300 nm
|
| Detector 1 | 7 Mp flatpanel (FP), 14-bit |
| Detector 2 | 27Mp true 16-bit back-illuminated sCMOS |
| Energy filter changer |
Automatic, 7 positions
|
| Integrated anti-vibration | Granite platform on pneumatic leveling feet |
| Positioning accuracy during scanning: rotation runout | < 50 nm |
| X-RAY SOURCE | |
|
Type
|
Open (pumped) source with tungsten on diamond target |
| Smallest spotsize | 250-300 nm |
| Energy/Power Range | 20-160 kV, 16W |
| Vacuum | Fully integrated into the system |
| XRF Module | 2 x 50 kV, 50 W each |
| X-RAY CAMERA | |
| Detector 1 | 7MP 14-bit Flatpanel |
| Detector 2 | 27Mp True 16-bit, back-illuminated sCMOS |
| Radiation protection | Both with radiation hardened fiber-optics |
| XRF Module | Photon-counting 4 Mp detector, 300 eV energy resolution |




